Interface between VAC and VIS

Interface Item (1) VIS dimension

Type-A

TBD

Type-B

1500 (dia.) x 3200 (height, including 200mm legs)

Type-C

2000 (dia.) x 3200 (height, including 200mm legs)

See the slides for the external review (here).
Also see here for Type-A chamber room.

Interface Item (2) Feed-through flange

TBD

Interface/VAVI (last edited 2012-05-21 13:36:06 by KentaroSomiya)