DGS Maintainance Day Confirmation
- Stepper Motor Power and Limit Switch Status Check
- Release Sensor Status Check
Picomotor PingTest Check(20210910-)
History
Pico Ping: SR3_IM: NG ETMX: NG ETMY: NG SR2_STM: NG
Pico Ping: BS_BF:NG SR2_STM:NG
Pico Ping: ETMX: NG SR2(IM): NG