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* [[https://gwdoc.icrr.u-tokyo.ac.jp/cgi-bin/private/DocDB/ShowDocument?docid=12522 | Pre-Clean Room for PSL/PR-area ]] * [[https://gwdoc.icrr.u-tokyo.ac.jp/cgi-bin/private/DocDB/ShowDocument?docid=12523| Kotohira FFU ULPA for mainly IEXYA, IEXYV]] * [[https://gwdoc.icrr.u-tokyo.ac.jp/cgi-bin/private/DocDB/ShowDocument?docid=12524 | MAC-2A-251DC-ULS-(dial) ]] == [2] Heat Generators == * IXV || Items || O4a || June/30 || * || * || || Items || O4a || June/30 || * || * || * IYV * Corner 1F * EX *EY |
[1] Clean booth
[2] Heat Generators
- IXV
|| Items || O4a || June/30 || * || * || || Items || O4a || June/30 || * || * ||
- IYV
- Corner 1F
- EX
- EY