|
Size: 10673
Comment:
|
Size: 10673
Comment:
|
| Deletions are marked like this. | Additions are marked like this. |
| Line 42: | Line 42: |
| || |||| Nakatomi BS |||| x |||| → |||| → |||| → |||| → || | || |||| Nakatomi BS |||| o |||| → |||| → |||| → |||| → || |
| Line 81: | Line 81: |
| || - Dehumid |||| Mitsubishi |||| o |||| → |||| |||| → || | || |||| Dehumidifier |||| o |||| → |||| |||| → || |
| Line 90: | Line 90: |
| || - Dehumid |||| Mitsubishi |||| o |||| → |||| → |||| → || | || |||| Dehumidifier |||| o |||| → |||| → |||| → || |
[1] Clean booth
[2] Heat Generators
Corner
Corner 1F |
Items |
O4a |
6/30 |
7/1: Cryocoolers Off |
7/6~7:FFU ON in OMC |
7/11 |
||||||
- cooler |
Precision Cooler |
o(19.00) |
→ |
o(23.50) |
o(20.00) |
→ |
||||||
|
Daikin Cooler MCF-C |
x |
→ |
→ |
→ |
→ |
||||||
|
Daikin Cooler BS-C |
x |
o |
→ |
→ |
→ |
||||||
|
Daikin Cooler SR-C |
x |
→ |
→ |
→ |
→ |
||||||
|
Daikin Cooler IYC-C |
x |
→ |
→ |
→ |
→ |
||||||
- light |
Ceiling Lights A |
1/2 |
→ |
→ |
→ |
→ |
||||||
|
Ceiling Lights B |
1/2 |
→ |
→ |
→ |
→ |
||||||
|
Ceiling Lights C |
1/1 |
→ |
→ |
→ |
→ |
||||||
|
Ceiling Lights IXC |
1/2 |
→ |
→ |
→ |
→ |
||||||
|
Ceiling Lights IXA |
1/1 |
→ |
→ |
→ |
→ |
||||||
|
Ceiling Lights IYC |
1/2 |
→ |
→ |
→ |
→ |
||||||
|
Ceiling Lights IYA |
1/1 |
→ |
→ |
→ |
→ |
||||||
- heater |
Sunrise Heater BS |
x |
→ |
o L1 |
x |
→ |
||||||
|
Sunrise Heater SR2 |
x |
→ |
o L1 |
x |
→ |
||||||
|
Sunrise Heater OMC |
x |
→ |
o L2 |
o L1 |
→ |
||||||
|
Sunrise Heater PR2 |
x |
→ |
→ |
→ |
→ |
||||||
|
Sunrise Heater DGS |
x |
→ |
→ |
→ |
→ |
||||||
|
Delonghi Heater MCF |
o L2 |
x |
→ |
→ |
→ |
||||||
|
Sunrise Heater EXC-A |
o L3 |
→ |
→ |
→ |
x |
||||||
- ffu |
SR FFUs |
03/?? |
→ |
→ |
→ |
→ |
||||||
|
BS FFUs |
03/?? |
→ |
→ |
→ |
→ |
||||||
|
PR FFUs |
04/?? |
→ |
→ |
→ |
→ |
||||||
|
MCE FFUs |
01/16 |
→ |
→ |
→ |
→ |
||||||
- airdry |
IXC-A Air Dryer |
x |
o |
→ |
→ |
→ |
||||||
- Dehumid |
Mitsubishi IYC-C |
o |
→ |
→ |
→ |
→ |
||||||
|
Mitsubishi BS-C |
o |
→ |
→ |
→ |
→ |
||||||
|
Airis DGS-1 |
o |
→ |
→ |
→ |
→ |
||||||
|
Airis DGS-2 |
o |
→ |
→ |
→ |
→ |
||||||
|
Nakatomi BS |
o |
→ |
→ |
→ |
→ |
||||||
|
Items |
O4a |
6/30 |
|
||||
PSL Room |
Precision Cooler #1 |
o |
→ |
|
||||
|
Precision Cooler #2 |
x |
→ |
|
||||
|
Items |
O4a |
6/30 |
7/3: Cryocoolers ON |
||||
IXC |
TMP/Scrolls |
3 x |
3 o |
→ |
||||
|
Ion Pump |
2 o |
2 x |
→ |
||||
|
Duct Shield Cooler |
2 o |
2 x |
2 o |
||||
|
Radiation Shield Cooler |
2 x |
→ |
→ |
||||
|
Payload Cooler |
2 x |
→ |
→ |
||||
|
FFUs |
??/24 |
→ |
→ |
||||
|
KAOCHs |
zero |
→ |
→ |
||||
|
Items |
O4a |
6/30 |
7/3: Cryocoolers ON |
||||
IYC |
TMP/Scrolls |
3 x |
3 o |
→ |
||||
|
Ion Pump |
2 o |
2 x |
→ |
||||
|
Duct Shield Cooler |
2 o |
2 x |
2 o |
||||
|
Radiation Shield Cooler |
2 x |
→ |
→ |
||||
|
Payload Cooler |
2 x |
→ |
|
||||
|
FFUs |
??/24 |
→ |
→ |
||||
|
KAOCHs |
zero |
→ |
→ |
||||
|
Items |
O4a |
6/30 |
|
||||
IXA |
TMP/Scrolls |
1x |
→ |
|
||||
|
FFUs |
??/10 |
→ |
|
||||
|
Items |
O4a |
6/30 |
|
||||
IYA |
TMP/Scrolls |
1x |
1o |
|
||||
|
FFUs |
??/10 |
→ |
|
||||
|
Items |
O4a |
6/30 |
|
7/11 dehumidifier change |
|||||
IXV |
Air conditioner |
x (weak, 20C) |
o (weak, 20C) |
|
→ |
|||||
|
Delongho Heater |
x |
o L4 |
|
o L3 |
|||||
|
Ceiling Lights |
o |
→ |
|
→ |
|||||
|
TMP/Scrolls |
1x |
1o |
|
→ |
|||||
|
Ion Pump |
1o |
1x |
|
→ |
|||||
|
FFUs |
2 |
→ |
|
→ |
|||||
|
Dehumidifier |
o |
→ |
|
→ |
|||||
|
Items |
O4a |
6/30 |
7/1 |
7/4 |
7/10 |
7/11 |
|||||||
IYV |
Air conditioner |
o (weak, 20C) |
→ |
→ |
→ |
→ |
→ |
|||||||
|
Delongho Heater |
o L4 |
o L2 |
o L1 |
o L2 |
x |
o L1 |
|||||||
|
Ceiling Lights |
o |
→ |
→ |
→ |
→ |
→ |
|||||||
|
TMP/Scrolls |
x |
o |
→ |
→ |
→ |
→ |
|||||||
|
Ion Pump |
o |
x |
→ |
→ |
→ |
→ |
|||||||
|
FFUs |
2 |
→ |
→ |
→ |
→ |
→ |
|||||||
|
Dehumidifier |
o |
→ |
→ |
→ |
|||||||||
EX
|
Items |
O4a |
|
|
||||
EX 1F |
Air conditioner 1 |
x |
|
|
||||
|
Air conditioner 2 |
x |
|
|
||||
|
Ceiling Lights |
0/1 |
|
|
||||
|
Items |
O4a |
|
|
||||
EXC |
TMP/Scrolls |
4x |
|
|
||||
|
Ion Pump |
2o |
|
|
||||
|
Duct Shield Cooler |
2o |
|
|
||||
|
Radiation Shield Cooler |
2o |
|
|
||||
|
Payload Cooler |
2x |
|
|
||||
|
FFUs |
??/24 |
|
|
||||
|
KAOCHs |
zero |
|
|
||||
|
Items |
O4a |
|
|
||||
EXA |
TMP/Scrolls |
1x |
|
|
||||
|
Ion Pump |
1o |
|
|
||||
|
FFUs |
??/10 |
|
|
||||
|
Ceiling Lights |
1/1 |
|
|
||||
|
Items |
O4a |
|
|
||||
EXV |
Air conditioner |
x |
|
|
||||
|
Delongho Heater |
o L3 |
|
|
||||
|
Ceiling Lights |
0/1 |
|
|
||||
|
TMP/Scrolls |
1x |
|
|
||||
|
Ion Pump |
1o |
|
|
||||
|
FFUs |
1 |
|
|
||||
EY
|
Items |
O4a |
6/29 |
7/3 |
7/13 |
|||||
EY 1F |
Air conditioner |
x |
x |
→ |
→ |
|||||
|
Ceiling Lights |
1/1 |
1/1 |
→ |
→ |
|||||
|
Delonghi Heater 1 |
o L5 |
o L2 |
o L1 |
o L2 |
|||||
|
Sunrise Heater 1 |
o L3 |
o L1 |
→ |
→ |
|||||
|
Sunrise Heater 2 |
o L3 |
o L1 |
→ |
→ |
|||||
|
Items |
O4a |
6/29 |
7/3 |
||||
EYC |
TMP/Scrolls |
4x |
3o, 1x |
→ |
||||
|
Ion Pump |
2o |
2x |
→ |
||||
|
Duct Shield Cooler |
2o |
2x |
2o |
||||
|
Radiation Shield Cooler |
2x |
→ |
→ |
||||
|
Payload Cooler |
2x |
→ |
→ |
||||
|
FFUs |
13/24 |
→ |
→ |
||||
|
KAOCHs |
zero |
→ |
→ |
||||
|
Items |
O4a |
6/29 |
|
||||
EYA |
TMP/Scrolls |
1x |
1o |
|
||||
|
FFUs |
5/10 |
2/10 |
|
||||
|
Ceiling Lights |
1/1 |
→ |
|
||||
|
Items |
O4a |
6/29 |
|
||||
EYV |
Air conditioner |
x |
→ |
|
||||
|
Sunrise Heater |
o L2 |
x |
|
||||
|
Ceiling Lights |
0/1 |
→ |
|
||||
|
TMP/Scrolls |
1x |
1o |
|
||||
|
Ion Pump |
1o |
1x |
|
||||
|
FFUs |
1/10 |
→ |
|
||||