How to realize X arm GR/IR alignment(from IMMT2(SR3) to ETMXY)

1. Enter Alignment Mode1

   • Go to Commissioning.Doc.

   • Select "LSC_Lock" in Commissioning.Doc.

   • Select "request [All]" in LSC_Lock.

   • Select "DOWN" in All.

   # Enter Alignment Mode2

2. Go to Commissioning.Doc.

3. Select "SEMI AUTO ALIGNMENT" in Commissioning.Doc.

4. Select "! engage" in SEMI AUTO ALIGNMENT. # arm GR alignment (ITMY misalign). X arm GR alignment (Resonate GR). X arm GR alignment (Check spot position). X arm GR alignment (PR3 Dithering).

   X arm GR alignment (find good FP axis & PR3 P/Y). X arm FP axis is established and PR3 P/Y is fixed.

X arm GR alignment (Record good TMSX). X arm IR alignment (Resonate IR). X arm IR alignment (PR2-IMMT2 alignment). X arm IR alignment (GR/IR resonance check). X arm GR/IR alignment Established. Y arm IR alignment Preparation. Y arm IR alignment (Resonate IR). Y arm IR alignment (Check spot position on ETMY). Y arm IR align (Adjust BS for ETMY spot centering). Y arm IR alignment (ITMY,ETMY alignment). Y arm IR alignment (Check spot on ITMY). Y arm IR alignment Established. Y arm IR alignment (Record good TMSY). Y arm IR alignment Established. Y arm GR alignment (Resonate GR). Y arm GR alignment (TMSY GR maximize with SR3). Y arm GR/IR alignment Established. FPMI Recovery (Exit from alignment mode). FPMI Recovery (Align ITMX). FPMI Recovery (Start FPMI).