Laser Room
PR-area (including MCF-IFI-MMT-PRM-PR3) & BS-area (including PR2, BS, SR2) & EXC, EYC
SR-area (including SR3, SRM, OMC) & I(XY)C & I(XY)V
I(XY)A
Pre-Clean Room for PSL/PR-area
Kotohira FFU ULPA for mainly IEXYA, IEXYV
MAC-2A-251DC-ULS-(dial)
