How to realize X arm GR/IR alignment(from IMMT2(SR3) to ETMXY)
Enter Alignment Mode1
Go to Commissioning.Doc.
- Select "LSC_Lock" in Commissioning.Doc.
Select "request [All]" in LSC_Lock.
Select "DOWN" in All.
Enter Alignment Mode2
Go to Commissioning.Doc.
- Select "SEMI AUTO ALIGNMENT" in Commissioning.Doc.
Select "! engage" in SEMI AUTO ALIGNMENT.
X arm GR alignment (ITMY misalign).
Go to Guardian Overview.
- Select "VIS_ITMY" in Guardian Overview.
Select "request [All]" in VIS_ITMY.
Select "Misaligned" in All.
X arm GR alignment (Resonate GR).
Go to Guardian Overview.
- Select "XARM" in Guardian Overview.
Select "request [All]" in XARM.
Select "Misaligned" in All.
You can see K1:AOS-TMSX_GR_PDA1_OUTPUT enhancement.
X arm GR alignment (Check spot position).
Go to Commissioning.Doc.
- Select CAMERA.
Select "TCAM Comm Mode" in CAMERA.
Select "X_end_TCAM Commissioning mode start in TCAM Comm Mode".
access http://172.16.33.39/vacuum for ETMX Spot Monitoring.
access "! Tcam IX" for ITMX Spot Monitoring in CAMERA.
X arm GR alignment (PR3 Dithering).
Go to Guardian Overview.
- Select "XARM" in Guardian Overview.
Select "request [All]" in XARM.
Select "MANUAL", then "ENGAGE_PR3_ADS" in All.
X arm GR alignment (find good FP axis & PR3 P/Y).
Go to Commissioning.Doc.
- Select "ALL VIS" in Commissioning.Doc.
Select "CRY-P" for both ITMX and ETMX in ALL VIS.
Select "OL SETPOINT" for ITMX and ETMX in CRY-P.
You can find for both ITMX and ETMX. Right click on slide bar and select “-1” as an increment. Never select large increment.
- Adjust (IE)TMX alignment to lead their spots on both (IE)TMX to be around center. Ideally, K1:AOS-TMSX_GR_PDA1_OUTPUT should be maximized.
- Or, Maximize K1:AOS-TMSX_GR_PDA1_OUTPUT by adjusting, firstly Yaw of IETMX and secondly Pitch.
Remember the value of K1:AOS-TMSX_GR_PDA1_OUTPUT (assuming VtmsxGR-0).
- Anyway, move Yaw/ETMX in one direction until you observe slight reduction of VtmsxGR-0.
- Move Yaw/ITMX in both direction to find max of VtmsxGR.
- (4-1) If you can find better VtmsxGR than Vtmsxgr-0, it means your selection for ETMX actuation is good direction.
- (4-2) If worse, bad direction.
- If good, repeat (2) (3) until you encounter (4-2). If bad, select opposite actuation then repeat (2)(3) until you encounter (4-2) again.
- If you find max point, perform (1)~(5) for Pitch/(IE)TMX. (1)~(6) is regarded as one “set” optimization.Ideally, it is better to perform 2 sets for each Yaw/Pitch.
X arm FP axis is established and PR3 P/Y is fixed.
X arm GR alignment (Record good TMSX).
Go to Commissioning.Doc.
- Select "SEMI AUTO ALIGNMENT" in Commissioning.Doc.
Push “! record TMS QPD" in SEMI AUTO ALIGNMENT.
X arm IR alignment (Resonate IR).
Go to Guardian Overview.
- Select "XARM" in Guardian Overview.
Select "request [All]" in XARM.
Select "IR_LOCKED" in XARM.
You can see K1:AOS-TMSX_GR_PDA1_OUTPUT enhancement.
X arm IR alignment (PR2-IMMT2 alignment).
X arm IR alignment (GR/IR resonance check).
X arm GR/IR alignment Established.
Y arm IR alignment Preparation.
Y arm IR alignment (Resonate IR).
Y arm IR alignment (Check spot position on ETMY).
Y arm IR align (Adjust BS for ETMY spot centering).
Y arm IR alignment (ITMY,ETMY alignment).
Y arm IR alignment (Check spot on ITMY).
Y arm IR alignment Established.
Y arm IR alignment (Record good TMSY).
Y arm IR alignment Established.
Y arm GR alignment (Resonate GR).
Y arm GR alignment (TMSY GR maximize with SR3).
Y arm GR/IR alignment Established.
FPMI Recovery (Exit from alignment mode).
FPMI Recovery (Align ITMX).
FPMI Recovery (Start FPMI).
