How to realize X arm GR/IR alignment(from IMMT2(SR3) to ETMXY)
Enter Alignment Mode1
Go to Commissioning.Doc.
- Select "LSC_Lock" in Commissioning.Doc.
Select "request [All]" in LSC_Lock.
Select "DOWN" in All.
Enter Alignment Mode2
Go to Commissioning.Doc.
- Select "SEMI AUTO ALIGNMENT" in Commissioning.Doc.
Select "! engage" in SEMI AUTO ALIGNMENT.
X arm GR alignment (ITMY misalign).
Go to Guardian Overview.
- Select "VIS_ITMY" in Guardian Overview.
Select "request [All]" in VIS_ITMY.
Select "Misaligned" in All.
X arm GR alignment (Resonate GR).
Go to Guardian Overview.
- Select "XARM" in Guardian Overview.
Select "request [All]" in XARM.
Select "Misaligned" in All.
You can see K1:AOS-TMSX_GR_PDA1_OUTPUT enhancement.
X arm GR alignment (Check spot position).
Go to Commissioning.Doc.
- Select CAMERA.
Select "TCAM Comm Mode" in CAMERA.
Select "X_end_TCAM Commissioning mode start in TCAM Comm Mode".
access http://172.16.33.39/vacuum for ETMX Spot Monitoring.
access "! Tcam IX" for ITMX Spot Monitoring in CAMERA.
X arm GR alignment (PR3 Dithering).
Go to Guardian Overview.
- Select "XARM" in Guardian Overview.
Select "request [All]" in XARM.
Select "MANUAL", then "ENGAGE_PR3_ADS" in All.
X arm GR alignment (find good FP axis & PR3 P/Y).
Go to Commissioning.Doc.
- Select "ALL VIS" in Commissioning.Doc.
Select "CRY-P" for both ITMX and ETMX in ALL VIS.
Select "OL SETPOINT" for ITMX and ETMX in CRY-P.
You can find for both ITMX and ETMX. Right click on slide bar and select “-1” as an increment. Never select large increment.
- Adjust (IE)TMX alignment to lead their spots on both (IE)TMX to be around center. Ideally, K1:AOS-TMSX_GR_PDA1_OUTPUT should be maximized.
- Or, Maximize K1:AOS-TMSX_GR_PDA1_OUTPUT by adjusting, firstly Yaw of IETMX and secondly Pitch.
Remember the value of K1:AOS-TMSX_GR_PDA1_OUTPUT (assuming VtmsxGR-0).
- Anyway, move Yaw/ETMX in one direction until you observe slight reduction of VtmsxGR-0.
- Move Yaw/ITMX in both direction to find max of VtmsxGR.
- (4-1) If you can find better VtmsxGR than Vtmsxgr-0, it means your selection for ETMX actuation is good direction.
- (4-2) If worse, bad direction.
- If good, repeat (2) (3) until you encounter (4-2). If bad, select opposite actuation then repeat (2)(3) until you encounter (4-2) again.
- If you find max point, perform (1)~(5) for Pitch/(IE)TMX. (1)~(6) is regarded as one “set” optimization.Ideally, it is better to perform 2 sets for each Yaw/Pitch.
X arm FP axis is established and PR3 P/Y is fixed.
X arm GR alignment (Record good TMSX).
Go to Commissioning.Doc.
- Select "SEMI AUTO ALIGNMENT" in Commissioning.Doc.
Push “! record TMS QPD" in SEMI AUTO ALIGNMENT.
X arm IR alignment (Resonate IR).
Go to Guardian Overview.
- Select "XARM" in Guardian Overview.
Select "request [All]" in XARM.
Select "IR_LOCKED" in All.
You can see K1:AOS-TMSX_GR_PDA1_OUTPUT enhancement.
X arm IR alignment (PR2-IMMT2 alignment).
Go to Commissioning.Doc.
- Select "ALL VIS" in Commissioning.Doc.
Select PR2 "OVERViEW" in ALL VIS.
Select "OPTIC SETPOINT" for PR2 in OVERVIEW for PR2.
You can find for PR2. Right click on slide bar and select “-1” as an increment. Never select large increment.
Select "IMMT2 in ALL VIS.
Select "OLSET OPTIC" for IMMT2. in OVERVIEW for IMMT2.
You can find for IMMT2. Right click on slide bar and select “-1” as an increment. Never select large increment.
- Maximize K1:AOS-TMSX_IR_PDA1_OUTPUT by adjusting, firstly Yaw of PR2/IMMT2 and secondly Pitch.
Remember the value of K1:AOS-TMSX_IR_PDA1_OUTPUT (assuming VtmsxIR-0).
- Anyway, move Yaw/PR2 in one direction until you observe slight reduction of VtmsxIR-0.
- Move Yaw/IMMT2 in both direction to find max of VtmsxIR.
- (4-1) If you can find better VtmsxIR than VtmsxIR-0, it means your selection for PR2 actuation is good direction.
- (4-2) If worse, bad direction.
- If good, repeat (2) (3) until you encounter (4-2). If bad, select opposite actuation then repeat (2)(3) until you encounter (4-2) again.
- If you find max point, perform (1)~(5) forPitch/PR2/IMMT2. (1)~(6) is regarded as one “set” optimization.Ideally, it is better to perform 2 sets for each Yaw/Pitch.
X arm IR alignment (GR/IR resonance check).
Go to Commissioning.Doc.
- Select "SEMI AUTO ALIGNMENT" in Commissioning.Doc.
Select "Align Xarm" in SEMI AUTO ALIGNMENT.
- Wait until auto alignment seems to be stable.
- Select left “!record” for GR, select“!record” for IR.
- Select “Disable Xarm”
X arm GR/IR alignment Established.
Y arm IR alignment Preparation.
Go to Guardian Overview.
- Select "VIS_ITMY" in Guardian Overview.
Select "request [All]" in VIS_ITMY.
Select "ALIGNED" in All.
- Select "VIS_ITMX" in Guardian Overview.
Select "request [All]" in VIS_ITMX.
Select "MISALIGNED" in All.
Y arm IR alignment (Resonate IR).
Go to Guardian Overview.
- Select "YARM" in Guardian Overview.
Select "request [All]" in YARM.
Select "IR_LOCKED" in All.
You can see K1:AOS-TMSIR_IR_PDA1_OUTPUT enhancement.
Y arm IR alignment (Check spot position on ETMY).
Y arm IR align (Adjust BS for ETMY spot centering).
Y arm IR alignment (ITMY,ETMY alignment).
Y arm IR alignment (Check spot on ITMY).
Y arm IR alignment Established.
Y arm IR alignment (Record good TMSY).
Y arm IR alignment Established.
Y arm GR alignment (Resonate GR).
Y arm GR alignment (TMSY GR maximize with SR3).
Y arm GR/IR alignment Established.
FPMI Recovery (Exit from alignment mode).
FPMI Recovery (Align ITMX).
FPMI Recovery (Start FPMI).
