How to realize X arm GR/IR alignment(from IMMT2(SR3) to ETMXY)
Enter Alignment Mode1
Go to Commissioning.Doc.
- Select "LSC_Lock" in Commissioning.Doc.
Select "request [All]" in LSC_Lock.
Select "DOWN" in All.
Enter Alignment Mode2
Go to Commissioning.Doc.
- Select "SEMI AUTO ALIGNMENT" in Commissioning.Doc.
Select "! engage" in SEMI AUTO ALIGNMENT.