Contents
Topics and Update
- This page has been updated by n.kami/kek, in April-July, 2023
Link to the original page in 2012 (レイアウト、真空装置doc) <= 以前(2012)のページ
Link to workshop: LVK Collaboration meeting 2023 (Sept. 11-15,2023, in Toyama)
Overview
Vac Layout (May 2023)
Online data
capture: 10-day trend
SEM-VAC: Slow monitor @ SEM
Mon: Long-term trend
Introductory document
Information
Document Internal
VAC VLAN IP Address
IP address |
Host Name |
Device |
Place |
Comment |
|
|
|
|
|
10.12.16.1/16 |
sioc-vac-ix01 |
SABA-TARO |
IXC |
|
|
|
|
|
|
10.12.97.1/16 |
- |
PLC |
IXC |
|
10.12.97.2/16 |
- |
MOXA |
IXC |
|
10.12.97.3/16 |
- |
PLC |
BS |
For ITMX+BSX LargeGV |
10.12.97.4/16 |
- |
PLC |
BS |
For BSY LargeGV |
10.12.97.5/16 |
- |
PLC |
ITMY AutoCloseRack#1 |
For ITMY LargeGV |
10.12.97.6/16 |
- |
MOXA |
ITMY AutoCloseRack#1 |
For ITMY LargeGV |
10.12.97.7/16 |
- |
PLC |
ITMX AutoCloseRack#2 |
For ITMX LargeGV *In production |
10.12.97.8/16 |
- |
MOXA |
ITMX AutoCloseRack#2 |
For ITMX LargeGV *In production |
|
|
|
|
|
10.12.99.1/16 |
- |
PLC |
ETMX |
For ETMX LargeGV |
|
|
|
|
|
10.12.100.1/16 |
- |
PLC |
ETMY |
For ETMY LargeGV |
Misc (not yet)
- local doc of activity reports, meetings
- Purchase products in 2022
Manual
Vac device
Gate valve: UHV Gate Valve (2012)、ゲートバルブコントローラ取説 by ELC(2018)
Pump
Roots |
||
TMP |
||
Ion Pump |
Edwards TMP manual at wiki (in test, to be removed)
Interface
LAN-RS485x2ports: MOXA NPort5250A manual (2021)、How to set IP
LAN-DIO: XIO-100 manual v2.1.0 (2022)、Command reference v2.1.0 (2022)
Misc
- Links to kek-wiki by tomaru (need an account)