RTFE

ADC0

ADC1

ADC2

k1lsc0

S1402737

S1402618

k1asc0

k1als0

k1ioo

S1402751

k1ioo1

S1402741

k1imc0

S1402743

k1omc0

S1402749

k1prm

k1pr0

S1707069

k1pr2

k1bs

k1srm

k1sr2

k1sr3

k1ix1

k1iy1

k1ex1

S1402752

k1ey1

S1911157

k1mcf0

S2113153

k1iy0

S1706966

S2113154

k1ex0

k1ey0

k1px1

k1test0

S1605837

RTFE

ADC

DAC

BIO16

BIO64

BO

Power supply

k1lsc0

2

1

1

4

0

Clean Booth

k1asc0

2

2

1

4

0

Clean Booth

k1als0

4

2

1

7

0

SC8-2

k1ioo

4

2

1

1

4

SC8-4

k1ioo1

4

2

1

6

0

SC8-4

k1imc0

2

2

1

3

0

Clean Booth

k1omc0

4

3

1

6

0

DC

k1omc1

1

0

1

3

0

DC

k1prm

1

2

1

3

1

DC

k1pr0

1

2

1

3

0

Clean Booth

k1pr2

1

2

1

4

1

Clean Booth

k1bs

1

2

1

3

0

Clean Booth

k1srm

1

2

1

3

0

DC

k1sr2

1

2

1

3

0

Clean Booth

k1sr3

1

2

1

3

0

DC

k1mcf0

2

0

1

0

0

DC

k1ix1

3

3

1

5

1

DC

k1iy1

3

3

1

5

1

DC

k1ex1

3

3

1

5

1

Wall

k1ey1

3

3

1

5

1

Wall

k1iy0

1

0

1

0

0

SC11-6

k1ex0

3

2

1

1

0

SX5-2

k1ey0

3

2

1

0

1

SY5-2

k1px1

1

0

1

0

0

k1test0

2

0

1

0

0

C4-2

TOTAL

54

44

24

77

11