Requirements
--- |
RMS Velocity [um/sec] |
RMS Angle [urad] |
ITMs and ETMs |
<240 (for green locking) |
<0.1 |
BS |
<1.6 |
<1 |
SRs |
<0.44 |
<1 |
PRs |
<7.3 |
<1 |
References
- K. Okutomi PhD thesis (Table 3.5) JGW-P1809347
- T. Sekiguchi PhD thesis (Table 5.2) JGW-P1504155
- Y. Michimura et al (Section 6) Classical and Quantum Gravity 34, 225001 (2017)