Requirements

=== RMS Motion===

---

Longitudinal Velocity [um/sec]

RMS Angle [urad]

ITMs and ETMs

<240 (for green locking)
<0.44 (for central part locking)

<0.1

BS

<1.6

<1

SRs

<0.44

<1

PRs

<7.3

<1

Displacement Noise

---

Displacement at 10 Hz [m/rtHz]

ITMs and ETMs

<xxx

BS

<xxx

SRs

<xxx

PRs

<xxx

References