CCD Monitors
Related subgroups: ISC, IOO
Contents
Scope
Applicable Documents
General Description
Receiver and Transmitter
Naming Conventions
Locations
Chamber or Table |
Object |
PRM |
PRM HR Face |
PR2 |
PR2 HR Face |
PR3 |
PR3 HR Face |
BS |
BS HR Face |
SRM |
SRM HR Face |
SR2 |
SR2 HR Face |
SR3 |
SR3 HR Face |
ITMX |
ITMX HR Face |
ITMY |
ITMY HR Face |
ETMX |
ETMX HR Face |
ETMY |
ETMX HR Face |
TRX Table |
Transmitted beam |
TRY Table |
Transmitted beam |
AS Chamber |
AS port beam |
OMC Chamber |
OMC Refl |
OMC Chamber |
OMC TR |
REFL Table |
REFL port beam |
Requirements
Characteristics
Inspection plans