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Size: 364
Comment:
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Size: 840
Comment:
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| Deletions are marked like this. | Additions are marked like this. |
| Line 18: | Line 18: |
| ||<#FFFF00>Chamber or Table||<#FFFF00>Object|| ||PRM||PRM HR Face|| ||PR2||PR2 HR Face|| ||PR3||PR3 HR Face|| ||BS||BS HR Face|| ||SRM||SRM HR Face|| ||SR2||SR2 HR Face|| ||SR3||SR3 HR Face|| ||ITMX||ITMX HR Face|| ||ITMY||ITMY HR Face|| ||ETMX||ETMX HR Face|| ||ETMY||ETMX HR Face|| ||TRX Table||Transmitted beam|| ||TRY Table||Transmitted beam|| ||AS Chamber||AS port beam|| ||OMC Chamber||OMC Refl|| ||OMC Chamber||OMC TR|| ||REFL Table||REFL port beam|| |
CCD Monitors
Related subgroups: ISC, IOO
Contents
Scope
Applicable Documents
General Description
Receiver and Transmitter
Naming Conventions
Locations
Chamber or Table |
Object |
PRM |
PRM HR Face |
PR2 |
PR2 HR Face |
PR3 |
PR3 HR Face |
BS |
BS HR Face |
SRM |
SRM HR Face |
SR2 |
SR2 HR Face |
SR3 |
SR3 HR Face |
ITMX |
ITMX HR Face |
ITMY |
ITMY HR Face |
ETMX |
ETMX HR Face |
ETMY |
ETMX HR Face |
TRX Table |
Transmitted beam |
TRY Table |
Transmitted beam |
AS Chamber |
AS port beam |
OMC Chamber |
OMC Refl |
OMC Chamber |
OMC TR |
REFL Table |
REFL port beam |
Requirements
Characteristics
Inspection plans